Product Description
The Filmetrics F54-XY-200 and F54-XY-300 automated thin-film thickness mappers measure patterned and unpatterned samples up to 200mm and 300mm diameter, respectively. Samples are easily mapped with an advanced spectral reflectance system and industry leading Filmetrics algorithms.
The compact system brings precision measurement positioning to production applications. A motorized X-Y-200 stage moves automatically to specified measurement locations, providing results as quick as two points per second. Measurements of 300mm wafers are supported by the additional high performance rotary stage in the F54-XYT-300 configuration.
Product Features
- Supports measurement of both patterned and unpatterned samples
- Wavelength range configurations cover 190 – 1700nm
- Minimum spot size of 5μm
- Autofocus and Pattern Recognition ability
- Enclosure interlock
- Live video image
- Accommodates up to 300mm round samples
- User-specified sample point mapping using rectangular, linear, polar, and custom configurations
- Manual or automatic deskew
- Sophisticated history function for saving, reproducing and plotting results
- On-board reflectance and thickness standards
- Comprehensive material library and advanced modeling algorithms
- 24-hour/5-day phone, email and online support
Applications
- Microspot measurement for patterned and unpatterned surfaces
Industries
Semiconductor Fabrication
- Semiconductor process films
- Compound semiconductor films
- Liquid crystal displays (LCDs)
- Optical coatings and electro-optical films
- Biomedical films and medical devices
- MEMS
Look at the Industries tab for additional details.
