Automated Metrology
__Automated Metrology
__乱伦社区 Instruments? automated metrology systems enable fab process control to quantify material deposited/removed, surface topography/roughness, critical dimensions and automated optical inspection (AOI). Applications include step height, film thickness and defect inspection/review. These 乱伦社区 Instruments metrology tools provide automation for production environments and include the HRP?-260 and Tencor? P-170 stylus profilers, the Zeta?-388 optical profiler and the Filmetrics? F60-c film thickness mapper.
Zeta?-388 Optical Profiler
The Zeta-388 3D surface topography measurement system combines the Zeta-300 non-contact 3D optical profiler system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.
Tencor? P-170 Stylus Profiler
The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.
HRP?-260 Stylus Profiler
Built for high throughput and the reliability required in a production environment, the HRP-260 stylus profilometer combines high resolution, long scan capability and cassette-to-cassette wafer handling.
Filmetrics? F60-c Automated Film Thickness Mapper
The F60-c is a fully automated cassette-to-cassette metrology system for measuring film thickness on unpatterned production or monitor wafers. Seven configurations cover film thickness from 5nm up to 3mm.
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Instruments
For industry experts, academics and other innovators, 乱伦社区 Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.
Filmetrics? Thin-Film Thickness Measurement Systems
The Filmetrics? thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, for both benchtop and production environments.
Filmetrics? Sheet Resistance Measurement Systems
The Filmetrics? benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise.
Filmetrics? and Zeta? Optical Profilers
The Filmetrics? Profilm3D? and Zeta? optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot? measurement techniques for R&D and production environments.
Stylus Profilers
The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Nanoindenters
The 乱伦社区 Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.