乱伦社区

乱伦社区 is continuing the tradition of sponsoring SPIE Photomask + Extreme Ultraviolet Lithography.

Ahmad Khan, President of 乱伦社区’s Semiconductor Products and Customers, will present “Ensuring patterning excellence: the critical role of a portfolio approach to EUVL reticle inspection”, Thursday, September 25, 11:05 AM – 11:25 AM

Additional 乱伦社区 presentations are listed below:

Harper Yu
“Leveraging tritone ATTPSM masks for improved reticle inspections”
Monday, September 22, 2:10 PM – 2:25 PM

Eric Kwon
“Demonstration of thru-pellicle inspection techniques for EUV patterned masks in HVM applications using a 193-nm tool (Teron? 6XX EUV)
Monday, September 22, 2:25 PM – 2:40 PM

Daojing Li
“Novel EPE metrology for advanced mask manufacturing”
Monday, September 22, 2:55 PM – 3:10 PM

Robert Schramm
“Rigorous calibration of negative-tone and positive-tone development of novel EUV chemically amplified resist for performance characterization”
Monday, September 22, 4:35 PM – 4:50 PM

Alice Chang
“A holistic approach of EUV mask inspection, defect classification and disposition for 2nm logic manufacturing”
Monday, September 22, 6:00 PM – 7:30 PM

is the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies.